【光電通信】科普｜一文讀懂激光芯片脊波導(dǎo)側(cè)壁粗糙度：為什么會(huì)拖慢一顆激光芯片？

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Payne & Lacey, A theoretical analysis of scattering loss from planar optical waveguides, Optical and Quantum Electronics (1994). https://doi.org/10.1007/BF00708339

Cheemalapati et al., Optimization of dry etching parameters for fabrication of polysilicon waveguides with smooth sidewall, Applied Optics (2014). https://doi.org/10.1364/AO.53.005745

NIST, Small Angle X-Ray Scattering Measurements of Lithographic Patterns With Sidewall Roughness. https://www.nist.gov/publications/small-angle-x-ray-scattering-measurements-lithographic-patterns-sidewall-roughness

LLNL, Integrated laser with low-loss high index-contrast waveguides for OEICs. https://www.osti.gov/servlets/purl/15013953

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